Thin Film Deposition


ID: AGC20.001.02


Nitinol, an alloy of Ni and Ti, exhibits outstanding shape memory and super-elastic properties based on its composition. It is an interesting candidate for a multitude of applications ranging from large-scale components used in aviation and automotive industries to small-scale structures, such as micro-sensors and stents due to its unique properties such as high corrosion and wear resistance, large recoverable strain up to 10%, and biocompatibility.


  • Pressure sensors

  • Accelerometers

  • Gyroscope

  • Temperature sensors

  • Biomedical devices


  • Deposition Thickness: between 0.8 to 10 µm

  • Compatible Substrates requirements:

      • Material: Si and Sapphire

      • Maximum Substrate size: 4” in diameter